Research Activities


Papers

1.Production Implanter Nissin NH-20SR, Y.Tamura, M.Nogami, M.Tanaka, T.Maeda, H.Kumazaki and S.Tamura, Nuclear Instruments and Methods in Physics Reserch., B37/38 (1989) 620.

2.Beam Scanning System for Large Tilt Angle Ion Implantation, M.Sasaki,M.Tanaka,H.Kawakami and H.Kumazaki, Nuclear Instruments and Methods in Physics Reserch., B37/38 (1989) 469.

3.Sweep Uniformity Control System in the Nissin NH-20SP, N.Nagai, K.Nishikawa and H.Kumazaki, Nuclear Instruments and Methods in Physics Reserch., B74(1993) 457.

4.Nissin EXCEED 2000-A New High Performance Medium Cuurent Implanter, T.Kawai, M.Naito, M.Tanjyo, N.Nagai, H.Kumazaki, K.Nishikawa, M.Nakaya, Y.Saito, S.Okuda, M.Hosono, Y.Tanaka, K.Iwasawa and M.Nakamura, Ion Implantation Technology.,94(1995)470.

5.Vacuum photothermal displacement of the shape-memory alloy for the developement of optical actuator, S.Inaba, M.Hioki, H.Kumazaki and K.Hane, J.Vac.Soc.Jpn.,7 (1994) 282.

6.Temperature dependence of resonance frequency of shape-memory alloy vibrated photothermally, S.Inaba, H.Kumazaki M.Horibe and K.Hane, Jpn.J.Appl.Phys.,33 (1994) 5064.

7.Pressure sensor using micromachined fiber core, H.Kumazaki,S.Shimamura, S.Inaba and K.Hane, Proc.14th Meeting Lightwave Sensing Technol., LST14-3 (1994) 15.

8.Pressure sensor using photothermal vibration of optical fiber core, H.Kumazaki S.Inaba and K.Hane, J.Vac.Soc.Jpn.,38 (1995) 176.

9.Photothermal vibration of fiber core for vibration-type sensor, S.Inaba, H.Kumazaki and K.Hane, Jpn.J.Appl.Phys.,34 (1995) 2018.

10.Photomechanical sensor using a photothermal vibration of an optical fiber in liquid, H.Kumazaki,S.Shimamura, S.Inaba and K.Hane, Technical Digest of The 13th Sensor Symposium, A2-3 (1995) 41.

11.Mechanical sensing using a microcantilever vibrated photothermally, H.Kumazaki,S.Shimamura,S.Inaba and K.Hane, Proc.15th Meeting Lightwave Sensing Technol., LST15-19 (1995) 139.

12.Pressure dependence of resonance characteristics of the microcantilever fabricated from optical fiber, H.Kumazaki S.Inaba and K.Hane, Vacuum .,47 (1996)475.

13.Temperature characteristics of vibrating type sensor using micromachined optical fiber-tip, H.Kumazaki, S.Inaba and K.Hane, Optical Review.,3 (1996) 135.

14.Light-Driven Actuators using Shape-Memory Alloys, A.Shimamura, J.Kurosawa,H.Kumazaki S.Inaba and K.Hane, Technical Digest of The 14th Sensor Symposium ,C3-2(1996) 259.

15.Deposition thickness sensor for ion sputtering apparatus, H.Kumazaki S.Inaba and K.Hane, T.IEE Japan., 117-E (1997)105.

16.Effect of cantilever size of laser-driven fiber core for deposition thickness measurement, H.Kumazaki S.Inaba and K.Hane, J.Vac.Soc.Jpn.,40 (1997) 303.

17.Optical measurement for deposition thickness using a thin@glass vibrator installed in fiber coupling, H.Kumazaki S.Inaba and K.Hane, J.Vac.Soc.Jpn.,41 (1998) 165.

18.Full-fiber-type sensing system for physical quantities using a photothermally vibrated quartz core cantilever, H.Kumazaki S.Inaba and K.Hane, T.IEE Japan., 120-E (2000)105.

19.Micromachining of optical fiber by reactive ion etching, H.Kumazaki Y.Yamada S.Inaba and K.Hane, J.Vac.Soc.Jpn., 43 (2000) 992.

20.Micromachining of optical fiber using reactive ion etching and its application, H.Kumazaki Y.Yamada T.Oshima S.Inaba and K.Hane, Jpn.J.Appl.Phys.,39 (2000) 7142.

21.Tunable wavelength filter using a bragg grating fiber thinned by plasma etching, H.Kumazaki Y.Yamada H.Nakamura S.Inaba and K.Hane, IEEE Photonics Technology Letters,13 (2001) 1206.

22.Tunable wavelength filter through bending control of asymmetric single-mode grating fiber, H.Kumazaki N.Nakashima S.Inaba and K.Hane, Optics Express,10 (2002) 469.

23.Three-dimensional micro-machining for fiber type optical control devices, H.Kumazaki, S.Inaba, K.Hane and Y.Nasu, T.IEE Japan. SM, 125 (2005) 211.

24.Quadrature Mach-Zehnder interferometer with application in optical coherence tomography, C.Flueraru, H.Kumazaki, S.Sherif, S.Chang and Y.Mao, J.Opt.A: Pure Appl. Opt.9(2007)L5.

25.Mechanical stress sensors using micromachined grating fibers, Hironori Kumazaki, Munehiro Hiramatsua, Hisakazu Oguria, Seiki Inabaa, and Kazuhiro Hane, 21st International conference on optical fiber sensors, (2011)7753-12.


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